Intro to photolithography

This presentation provides an industry-informed overview of photolithography as used in semiconductor memory fabrication. Topics include process and equipment fundamentals, measurements, and common defectivity, supported by real-world examples and diagrams. The material bridges theory and practice, enabling learners to understand both foundational principles and current industry applications.

Comments are included throughout the slides to clarify the role of engineers working in Photolithography at Micron, providing valuable career context and insight.

This module can be integrated into lectures, assignments, or as supplemental reading for courses in photolithography, semiconductor fabrication, microfabrication, or optics.